Mainly used in the field of film formation, the formation of a vacuum environment to realize the evaporation of solvents, assisting better film formation.

1. One-piece high sealing chamber design, chamber leakage rate meets the vacuum requirement (related to chamber volume and material outgassing);

2. Adjustable pumping speed, the pressure drop curve can be adjusted according to process requirements;

3. Rapid pumping capacity, vacuum rates can be designed according to customer requirements.;

4. Vacuum chamber pressure stability ≤ 5%;

5. Support product specifications from laboratory grade to mass production grade full size.